The design and fabrication of the proposed MEMS accelerometer. a Schematic diagram of the accelerometer with two-layered proof mass. The upper layer has flexures, stiffness tuning electrodes, and ...
STMicroelectronics NV has introduced a redesigned accelerometer with improved mechanical and thermal stability. The LIS2HH12 3-axis accelerometer is less sensitive to thermal and mechanical stress ...
MEMS (micro electromechanical system) inertial sensor technology provides a major structural shift in mechanical sensing. When the performance meets their needs, system developers welcome trading ...
In part one of this series, we reviewed the internal structure of a 3-axis high precision MEMS accelerometer. In this second article, we will review how to acquire a good starting dataset to establish ...
Researchers from Delft University of Technology have announced the development of a novel surface micromachined accelerometer. This innovative device utilizes a silicon carbide-carbon nanotube ...
A new series of analog MEMS accelerometers from Murata, the SCA720, are aimed specifically at electrically controlled suspension (ECS) and engine anti-vibration applications. Measuring 7.0 x 8.6 z 3.3 ...
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